Pdms Microfluidic Devices with Ptfe Passivated Channels

نویسندگان

  • M. Kanai
  • D. Uchida
  • S. Sugiura
  • Y. Shirasaki
  • J. S. Go
  • H. Nakanishi
  • T. Funatsu
  • S. Shoji
چکیده

PDMS microfluidic devices whose whole inner surfaces are covered with PTFE (polytetrafluoroethylene) are described. The major problems of PDMS fluidic devices in practical use, are surface degradation with organic solvents and unexpected absorption of chemical materials. In order to overcome these problems, spin/dip-coated perfluoro amorphous polymer is used to form the passivation PTFE layer of 0.2~$.trn thick on the PDMS microstructures. A prototype of PTFE passivated pneumatic microvalve was fabricated, and its valve actuation was evaluated.

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تاریخ انتشار 2003